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Amorphous carbon film growth

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Cross-sectional snapshots of the growing film for different incidence angles.
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The surface after 36,000 carbon impacts on a roughly 9x larger substrate.
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Cross-sections of the film grown under normal (a) and grazing (b) incidence; deposited atoms colored by order of arrival (blue to red), original substrate in grey.

Work by Minwoong Joe, Myoung-Woon Moon, Jungsoo Oh, Kyu-Hwan Lee, and Kwang-Ryeol Lee at KIST to model impact-induced surface instabilities in amorphous carbon (a-C) film growth, which leads to surface roughening under grazing impacts of energetic carbon atoms, using the reactive empirical bond order (REBO) potential.

The cross-sections of the grown films indicate a shadowing effect at work even under 0.2 nm rms surface roughness.

Related publications

  • Molecular dynamics simulation study of the growth of a rough amorphous carbon film by the grazing incidence of energetic carbon atoms, M. Joe, M.-W. Moon, J. Oh, K.-H. Lee, and K.-R. Lee, Carbon 50, 404 (2012). doi:10.1016/j.carbon.2011.08.053