Surface quality and material removal rate in nanoscale micro-laser aided polishing on AlN monocrystal via thermal effect

TT Do and TH Fang, TRIBOLOGY INTERNATIONAL, 198, 109950 (2024).

DOI: 10.1016/j.triboint.2024.109950

Monocrystalline AlN is a hard-brittle material. Thus, much focus has been on finding ways to treat it efficiently while minimizing damage. This work uses the molecular dynamics approach to examine the surface roughness and material removal process of monocrystalline AlN utilizing the micro-laser-aided polishing (MLA-PL) method. Hence, this study can theoretically examine the effects of temperature on the AlN material removal mechanism in the MLA-PL process using micro-laser-supported technology, using the average strength of the laser pulses as a variable. The results show that Laser irradiation in AlN affects root- mean-square roughness, subsurface damage depth, and material removal rate. Traditional polishing and MLA-PL caused dislocations, stacking defects, amorphous transitions, and hexagonal-to-cubic phase transitions.

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