Multiscale design and application of low adhesion strength DLC release layer

QY Liao and B Wang and F Ding and D Li and WY Liu and L Wang and YJ Yang and Y Chen, JOURNAL OF MATERIALS RESEARCH AND TECHNOLOGY-JMR&T, 26, 9518-9531 (2023).

DOI: 10.1016/j.jmrt.2023.09.247

In several disciplines, such as X-ray astronomy, synchrotron radiation facilities, X-ray microscopy, and X-ray lithograph, X-ray-focusing mirrors are crucial parts. They make it possible for scientists and researchers to execute cutting-edge nanoscale imaging techniques, analyze the structure and properties of materials, and explore the cosmos. However, controlling deformation during the manufacturing process is crucial to ensure the production of high-quality components. The strong bonding force of the film is one of the primary causes of mirror distortion while making X-ray-focusing mirrors. As a release layer, diamond-like carbon (DLC) was coated between Au and NiP alloy to lessen distortion during the demolding process for X-ray optic mirrors. In this investigation, we first used density functional theory (DFT) simulation to determine the binding energies of NiP-Au and C-Au. The interactions were then observed by high resolution transmission electron microscopy and scanning transmission electron microscopy. When Au is deposited at low energy and room temperature on a NiP substrate, the phenomena of diffusion layer creation at the interface can be seen for the first time in direct observation. The 6.8 nm diffusion layer between Au and NiP, which causes the high binding energy, is primarily responsible for the increased adhesion strength. Molecular dynamic simulation and tensile testing were used to compute and assess the adhesion strength. According to the findings, Au-C's adhesion strength was 96.4% lower than Au-NiP's. After the DLC release layer was introduced, the deformation of mirror shape as measured by a spot measurement method of optical performance significantly improved. In addition, we created and successfully implemented the 20 nm DLC release layer for the project.(c) 2023 The Author(s). Published by Elsevier B.V. This is an open access article under the CC BY-NC-ND license (

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